Maximum Pull Rate for Czochralski Crystal

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Constants used to calculate the maximum pull rate for  CZ crystal 
symbol Value
L 430 cal/g
N 2.33 g/cm3
 s 5.6710-5 erg/cm2secK4
 e 0.55
kM 0.048 cal/seccmK
TM 1690 K

( 2sekMTM



We can see that the maximum pull rate is inversely proportional to the square root of the crystal radius (diameter). Actual pull crystal pull rates are less than those calculated by the formula above.


By Zhongsheng Guo

EE7240 Integrated Circuit Engineering, Fall '2000

Louisiana State University


Copyright 2001 MiNDS Lab, University of Texas at Dallas.  All rights reserved.
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