UTD Clean Room

  • 5,866 sq. ft. class 1,000 and 100 Equipped with various processing and metrology equipment
    including evaporators, sputters, RIE, PECVD, LPCVD, mask aligners, e-beam lithography system, SEM, AFM, ellipsometer.

  • Flexus, etc.

UTD Labs

  • Dual beam FIB.

  • XPS.

  • TEM.

  • Microwave plasma etcher.

  • Diamond coating CVD system.

Modeling packages

  • HFSS.

  • Sonnet.

  • ANSYS.

  • EMP Lab.

Design tools

  • LASI.

  • Cadence.

  • Intellisuite.

Characterization facilities

  • Semiconductor parameter analyzer.

  • Source/measure units.

  • Probe stations.

  • Microscopes.

  • RF source.

  • Network analyzers, etc.

 

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University of Texas at Dallas
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