RF MEMS
  • Micromachined 3D high Q inductors (solenoid, spiral, toroidal) for RF front-end.

  • On-chip tunable 3D solenoid inductors.

  • RF MEMS Switches.

 

Photonics MEMS
  • MEMS-based tunable nano-photonic crystals (w/ U. Colorado).

  • Thermo-optic tunable light modulator.

  • Polymeric MEMS-based tunable grating.



 

Actuators
  • Metallic micro/nano grippers.

  • Polymer microgrippers for biological sample manipulation.

  • Improved optoelectronic device packaging using MEMS.

 

Bio MEMS
  • Microneedle array for painless drug delivery applications.

  • Wireless micro-neuro transponder for neuroprosthetics.

  • Nanoporous microcapsules for islet encapsulation.

  • Microfluidic chip w/ active/passive micro-mixers.


 

 


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University of Texas at Dallas
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